Active Edge Silicon Sensors Fabricated With Edge Ion Implantation and Microwave Annealing for Dopant Activation

Physics > Instrumentation and Detectors Title:Active Edge Silicon Sensors Fabricated With Edge Ion Implantation and Microwave Annealing for Dopant Activation View PDF HTML (experimental)Abstract:Silicon detectors typically require an insensitive area around their periphery to accommodate guard rings, which help maintain the electric field uniformity around edge pixels and isolate the high leakage current from the physical edges of the detector. Minimization of this insensitive region is desirable for applications in high-energy physics, X-ray experiments, and medical imaging. Existing active edge technology offers a solution for reduction or total elimination of the insensitive region, via a continuation of the highly doped backside up the sidewalls of the device. However, current methods for realizing this technology are complex and expensive. We propose a new technique that simplifies the fabrication of highly doped edges using side ion implantation and microwave annealing. Tests demonstrating the feasibility of this proposed process were performed on a set of sensors, and current versus bias voltage measurements probing the edge effects were performed before and after the edge implantation and annealing. To aid in interpretation of the results, TCAD simulations of the test devices were performed. Significant improvement in the edge leakage current is observed, indicating the promise of this simplified process for fabrication of active edge sensors. Current browse context: Bibliographic and Citation Tools Code, Data and Media Associated with this Article Demos Recommenders and Search Tools arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.